Fabrication of optical metasurfaces

ABSTRACT

The method is provided for fabricating an optical metasurface. The method may include depositing a conductive layer over a holographic region of a wafer and depositing a dielectric layer over the conducting layer. The method may also include patterning a hard mask on the dielectric layer. The method may further include etching the dielectric layer to form a plurality of dielectric pillars with a plurality of nano-scale gaps between the pillars.

If an Application Data Sheet (“ADS”) has been filed on the filing dateof this application, it is incorporated by reference herein. Anyapplications claimed on the ADS for priority under 35 U.S.C. §§ 119,120, 121, or 365(c), and any and all parent, grandparent,great-grandparent, etc. applications of such applications, are alsoincorporated by reference, including any priority claims made in thoseapplications and any material incorporated by reference, to the extentsuch subject matter is not inconsistent herewith.

If the listings of applications provided above are inconsistent with thelistings provided via an ADS, it is the intent of the Applicant(s) toclaim priority to each application that appears in the DomesticBenefit/National Stage Information section of the ADS and to eachapplication that appears in the Priority Applications section of thisapplication.

All subject matter of the Priority Applications and of any and allapplications related to the Priority Applications by priority claims(directly or indirectly), including any priority claims made and subjectmatter incorporated by reference therein as of the filing date of theinstant application, is incorporated herein by reference to the extentsuch subject matter is not inconsistent herewith.

CROSS-REFERENCE TO RELATED PATENT APPLICATION

The present application claims the benefit of the earliest availableeffective filing date(s) from the following listed application(s) (the“Priority Applications”), if any, listed below (e.g., claims earliestavailable priority dates for other than provisional patent applications,or claims benefits under 35 U.S.C. § 119(e) for provisional patentapplications, for any and all parent, grandparent, great-grandparent,etc. applications of the Priority Application(s)).

PRIORITY APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.16/267,053, filed Feb. 4, 2019, for “Fabrication of OpticalMetasurfaces,” which is a continuation of U.S. patent application Ser.No. 15/799,654, filed Oct. 31, 2017, for “Fabrication of OpticalMetasurfaces,” which claims the benefit of priority of United StatesProvisional Patent Application No. 62/462,105, entitled “Optical SurfaceScattering Antennas,” filed on Feb. 22, 2017, each of which isincorporated herein by reference.

FIELD

The disclosure is directed to methods for fabrication of metasurfaces.In particular, the disclosure is directed to a combination of highresolution and low resolution processes for fabrication of metasurfacesincluding arrays of dielectric pillars with nano-scale gaps between thedielectric pillars. The fabrication process also includes filling thenano-scale gaps with a refractive index tunable core material.

BACKGROUND

Autonomous systems, such as vehicles, drones, robotics, security,mapping, among others, need to view the world in 3D. Scanning LightDetection and Ranging (Lidar) is the 3D sensor for self-driving cars.The current Lidar is unreliable, bulky and high cost. Lidar can also beused to make high-resolution maps and provides dynamic field of view.

Solid state Lidar uses chips and does not include moving parts and thushas high reliability. The solid state Lidar also uses low power, andsmall packages, and is able to use low cost CMOS fabrication technique.The solid state Lidar can have mass production. However, there stillremains a need to develop techniques to produce solid-state Lidar.

BRIEF SUMMARY

In an embodiment, a method is provided for fabricating an opticalmetasurface. The method may include depositing a conductive layer over aholographic region of a wafer and depositing a dielectric layer over theconducting layer. The method may also include patterning a hard mask onthe dielectric layer. The method may further include etching thedielectric layer to form a plurality of dielectric pillars with aplurality of nano-scale gaps between the pillars.

In an embodiment, a method is provided for fabricating dielectricpillars having a nano-scale gap inbetween. The method may includedepositing a dielectric layer over a conducting layer. The method mayalso include patterning a hard mask on the dielectric layer by a highresolution process. The method may further include applying a plasma toetch a portion of a dielectric layer at a temperature below roomtemperature in a chamber to form dielectric pillars with the nano-scalegap.

Additional embodiments and features are set forth, in part, in thedescription that follows, and will become apparent to those skilled inthe art upon examination of the specification or may be learned by thepractice of the disclosed subject matter. A further understanding of thenature and advantages of the present disclosure may be realized byreference to the remaining portions of the specification and thedrawings, which form a part of this disclosure.

BRIEF DESCRIPTION OF THE DRAWINGS

The description will be more fully understood with references to thefollowing figures and data graphs, which are presented as variousembodiments of the disclosure and should not be construed as a completerecitation of the scope of the disclosure, wherein:

FIG. 1A shows a top overview of a holographic metasurface device inaccordance with embodiments of the disclosure.

FIG. 1B is a perspective view of a 1D holographic metasurface device inaccordance with embodiments of the disclosure.

FIG. 1C is a perspective view of a 2D holographic metasurface device inaccordance with embodiments of the disclosure.

FIG. 2A shows a side view of one sub-wavelength holographic elementincluding a pair of a-Si pillars in the array of FIG. 1B or 1C inaccordance with embodiments of the disclosure.

FIG. 2B shows a schematic of the 2D holographic metasurface includingmetal vias in accordance with embodiments of the disclosure.

FIG. 3 is a flow chart illustrating the steps of forming the 1Dholographic metasurface in accordance with embodiments of thedisclosure.

FIG. 4A shows the 1D metasurface before the integration of liquidcrystals in accordance with embodiments of the disclosure.

FIG. 4B shows the 1D metasurface after the integration of liquidcrystals in accordance with embodiments of the disclosure.

FIG. 5 shows a cross-sectional view of deposition of a conductive layerfor wirebond on a first portion of a wafer in accordance withembodiments of the disclosure.

FIG. 6 shows a cross-sectional view of deposition of a conductive layeras a metallic reflector on a second portion of the wafer in accordancewith embodiments of the disclosure.

FIG. 7 shows a cross-sectional view of plasma enhanced chemical vapordeposition (PECVD) of dielectric layer (e.g. SiO₂) over the conductivelayers and etching the dielectric layer in accordance with embodimentsof the disclosure.

FIG. 8 shows a cross-sectional view of PECVD and etching of thedielectric layer (e.g. SiO₂) after the step of FIG. 7 in accordance withembodiments of the disclosure.

FIG. 9 shows a cross-sectional view of PECVD of amorphous silicon afterthe step of FIG. 8 in accordance with embodiments of the disclosure.

FIG. 10 shows a cross-sectional view of deposition of a hard mask (e.g.Al₂O₃) after the step of FIG. 9 in accordance with embodiments of thedisclosure.

FIG. 11 shows a cross-sectional view of e-beam lithography of resist(e.g. PMMA) after the step of FIG. 10 in accordance with embodiments ofthe disclosure.

FIG. 12 shows a cross-sectional view of etching of the hard mask (e.g.Al₂O₃) with a patterned resist (e.g. PMMA) to form a nano-scale gap inthe hard mask after the step of FIG. 11 in accordance with embodimentsof the disclosure.

FIG. 13 shows a cross-sectional view of stripping the patterned resist(e.g. PMMA) after the step of FIG. 12 in accordance with embodiments ofthe disclosure.

FIG. 14 shows a cross-sectional view of etching the a-Si layer with thepatterned hard mask (e.g. Al₂O₃) to form a nano-scale gap of a highaspect ratio between the a-Si pillars in the a-Si layer and to exposethe titanium layer after the step of FIG. 13 in accordance withembodiments of the disclosure.

FIG. 15 shows a cross-sectional view of wet etching the titaniumadhesion layer to expose the conductive layer after the step of FIG. 14in accordance with embodiments of the disclosure.

FIG. 16 shows a cross-sectional view of wire bonding to the conductivelayer after the step of FIG. 15 in accordance with embodiments of thedisclosure.

FIG. 17 shows a cross-sectional view of applying liquid crystal to fillthe nano-scale gap between the a-Si pillars in the a-Si layer after thestep of FIG. 16 in accordance with embodiments of the disclosure.

FIG. 18 shows the processing issues near an amorphous silicon pillar inaccordance with embodiments of the disclosure.

DETAILED DESCRIPTION

The disclosure may be understood by reference to the following detaileddescription, taken in conjunction with the drawings as described below.It is noted that, for purposes of illustrative clarity, certain elementsin various drawings may not be drawn to scale.

Overview

The disclosure provides methods for fabricating a holographicmetasurface device, which is operable at higher frequencies, especiallyat infrared or visible frequencies. When operating frequencies arescaled up to optical (infrared/visible) frequencies, the sizes ofindividual scattering elements and the spacing between adjacentscattering elements are proportionally scaled down to preserve thesubwavelength/metamaterial aspect of the technology. The relevant lengthscales for operation at optical frequencies are typically on the orderof microns or less, which are smaller than the typical length scales forconventional printed circuit board (PCB) processes.

The methods include micro-lithographic processes, which are referred toa low resolution process for processing features larger than 1 μm. Thedisclosure also includes nano-lithographic processes for features assmall as 50 nm, which are also referred to a high resolution process.

The disclosure also provides methods for etching the a-Si pillars belowroom temperature to reduce undercut, for example, less than 10 nm.

FIG. 1A shows a top overview of a holographic metasurface device inaccordance with embodiments of the disclosure. As shown in FIG. 1A, aholographic metasurface device 100 has a holographic metasurface region102, including an array of holographic elements on a first portion of awafer 114, which can be seen in FIG. 1B or FIG. 1C. The holographicmetasurface region 102 includes an array of hologram elements. Eachholographic element includes a pair of dielectric pillars and arefractive index tunable core between the pair of dielectric pillars.The dielectric pillars may be formed of amorphous silicon (a-Si) orcrystalline silicon.

The holographic metasurface device 100 may also have an interconnectregion 104 including CMOS transistors on a second portion of the wafer.The CMOS transistors in the interconnect region 104 can control thevoltage applied to the dielectric pillars of each of the holographicelements. The CMOS transistors have low static power consumption andhigh noise immunity. The array of holographic elements and theelectrical control circuit are decoupled.

FIG. 1B is a perspective view of 1D holographic metasurface device inaccordance with embodiments of the disclosure. As shown in FIG. 1B, anarray 102A includes a plurality of columns of holographic elements 106arranged linearly on a wafer.

FIG. 1C is a perspective view of 2D holographic metasurface device inaccordance with embodiments of the disclosure. As shown in FIG. 1C, anarray 102B may also include a plurality of holographic elements 108arranged in rows 110 and columns 112 on a wafer 114.

FIG. 2A shows a side view of one of the sub-wavelength holographicelement including a pair of a-Si pillars in the array of FIG. 1B inaccordance with embodiments of the disclosure. As depicted, aholographic element 200, e.g. a sub-wavelength metasurface holographicelement, includes a refractive index tunable material 204 between twodielectric pillars 202, such as a-Si pillars over a wafer 210. The wafer210 may be a crystalline silicon wafer, among others. A control voltage206 is applied across the two dielectric pillars 202. The electric andmagnetic energy densities are across the holographic element 200. Thedielectric pillars 202 are placed over an oxide layer 208, such asAl₂O₃, which is an etch stop layer.

A metallic reflector 210 is placed between the wafer 210 and the oxidelayer 206. In some embodiments, the metal reflector 210 under thedielectric pillars 202, such as amorphous silicon (a-Si) pillars, may bemade from copper, aluminum, or a CMOS-compatible metal, withoutsacrificing performance. The noble metals gold and silver are notCMOS-compatible.

The grazing incidence of the incident wave excites magnetic-like Mieresonances in the a-Si pillars with a high Q factor, enabling dynamicmodulation of the phase. Additionally, the a-Si pillars are depositedover a metallic reflector, which makes the structure operate as areflect-array and thus is possible to integrate with controlelectronics. The resonator includes two silicon sub-pillars that areseparated by a tunable core material having a tunable refractive index.

Under the grazing incidence excitation, the electric field is stronglylocalized in the core between the pillars, while the magnetic field isstrongly localized to the entire hologram element including the pillarsand the core.

The reflection phase of the dielectric pillars is sensitive to therefractive index of the core material, with phase modulation of nearly2π possible with an index modulation of Δn/n of about 7%. The highsensitivity to the refractive index of the core material is enabled bythe high Q of the resonance, for example, a Q of 64, which can be seenin a simulated reflection spectrum (not shown). The high sensitivity ofthe reflection phase to the refractive index of the core enables theintegration of refractive index tunable core material into the Sipillars to create dynamic metasurfaces.

Since the refractive index modulation range of the tunable dielectricmaterials may be small, one challenge for designing an array of tunableradiating or scattering elements is to create a high Q factor, low-loss,subwavelength resonators. The Q factor is a dimensionless parameter thatcharacterizes a resonator's bandwidth relative to its center frequency.High Q factor indicates a lower rate of energy loss relative to thestored energy of the resonator. Resonators with high Q factors have lowdamping.

Tunable Core Material Liquid Crystal

Liquid crystals (LCs) exhibit anisotropy in the refractive index, whichdepends on molecular orientation of the liquid crystals. The refractiveindex of the liquid crystal can be controlled with an AC electric field.In the widely-used nematic liquid crystals, modulation between theextraordinary and ordinary refractive index can be up 13%, exceeding theperformance of EO polymers.

In some embodiments, an LC material has a relatively high switchingspeed. The switching time of LCs can be significantly reduced ingeometries with smaller electrode spacing and low viscosity LCs, suchthat microsecond switching times are possible in metasurface structures.The switching time can be further reduced by employing orthogonalelectrodes. The high switching speed LCs may be suitable for scanninglight Detection and Ranging (Lidar) or computational imaging based onstructured illumination where MHz speeds may be desired.

Electro-Optic Polymers

Electro-optic (EO) polymer materials exhibit a refractive index changebased on second order polarizability, known as the Pockels Effect, wherethe index modulation is proportional to the applied static or RFelectric field. The index modulation is given by:

Δn=−½n ³ r ₃₃ E

where n is the linear refractive index, E is the applied electric fieldand r₃₃ is the Pockels coefficient. The electric field is limited by adielectric breakdown. The EO polymers can potentially achieve indexmodulation as large as 6%.

The response time of EO polymers is extremely fast (i.e. several fs),resulting in device modulation speeds of at least 40 GHz. Due to theirlarge nonlinear coefficients, compared with crystalline electro-opticcrystalline materials, such as lithium niobate, EO polymers promisecompact modulators, enabling high-density photonic integrated circuits.

In some approaches, EO polymers may be suitable for applications whereswitching rates of MHz and GHz may be desired, such as Lidar single beamscanning and structured illumination, or free space opticalcommunications with holograms that simultaneously perform beam formingand data encoding, thus allowing multi-user MIMO schemes.

Chalcogenide Glasses

Chalcogenide glasses have a unique structural phase transition from thecrystalline phase to the amorphous phase—which have strikingly differentelectrical and optical properties—with refractive index modulation inthe short wave infrared spectrum of about 30%. The phase transition isthermally induced, which is typically achieved through direct electricalheating of the chalcogenide glasses. A prototypical chalcogenide glassis Ge₂Sb₂Te₅ (GST), which becomes crystalline at about 200° C. and canbe switched back to the amorphous state with a melt-quenchingtemperature of about 500° C.

In addition to the large index modulation between the amorphous andcrystalline states of about 30%, another attractive feature of the GSTis that the material state can be maintained in the absence of anyadditional electrical stimulus. For this reason, GST is nearingcommercialization as next-generation non-volatile electronic memory andhas also been demonstrated as a constituent of all-optical memory.

In some embodiments, a chalcogenide glass material may be suitable forapplications where it is desired to only occasionally reconfiguremetasurfaces and yet provide good thermal stability and environmentalstability. For example, in free space optical links, gradual drift ofthe transmitter or receiver may be compensated by low duty cycle changesto the beam pointing direction. At the same time, the large indexmodulation in these materials allows for the use of lower Q resonators,simplifying design and easing fabrication tolerances.

Turning to FIG. 2A again, as an example, the excitation is at 80°relative to normal and transverse magnetic (TM) polarized. Thereflection phase is as a function of refractive index of the tunablecore material. The reflection spectrum of a metasurface element shows apeak near a laser wavelength of 1550 nm. A Q factor for resonance may be64. The voltage may vary from −5 v to 5 v. The silicon pillar is 480 nmhigh and 100 nm wide. The nano-scale gap between the two pillars is 60nm. The pitch of the element is 400 nm. The Cu reflector is about 150 nmthick, and the oxide layer between the bottom of the pillars and the Cureflector is about 25 nm thick.

In some embodiments, the nano-scale gap may vary from 75 nm to 200 nm.In some embodiments, the gap is equal to or greater than 75 nm. In someembodiments, the gap is equal to or greater than 100 nm. In someembodiments, the gap is equal to or greater than 125 nm. In someembodiments, the gap is equal to or greater than 150 nm. In someembodiments, the gap is equal to or greater than 175 nm. In someembodiments, the gap is equal to or less than 200 nm. In someembodiments, the gap is equal to or less than 175 nm. In someembodiments, the gap is equal to or less than 150 nm. In someembodiments, the gap is equal to or less than 125 nm. In someembodiments, the gap is equal to or less than 100 nm.

In some embodiments, the pitch of the element may vary from 200 nm to1.6 μm. In some embodiments, the pitch is equal to or greater than 200nm. In some embodiments, the pitch is equal to or greater than 400 nm.In some embodiments, the pitch is equal to or greater than 600 nm. Insome embodiments, the pitch is equal to or greater than 800 nm. In someembodiments, the pitch is equal to or greater than 1.0 μm. In someembodiments, the pitch is equal to or greater than 1.2 μm. In someembodiments, the pitch is equal to or greater than 1.4 μm. In someembodiments, the pitch is equal to or less than 1.6 μm. In someembodiments, the pitch is equal to or less than 1.4 μm. In someembodiments, the pitch is equal to or less than 1.2 μm. In someembodiments, the pitch is equal to or less than 1.0 μm. In someembodiments, the pitch is equal to or less than 800 nm. In someembodiments, the pitch is equal to or less than 600 nm. In someembodiments, the pitch is equal to or less than 400 nm.

In some embodiments, the depth of the pillars may range from 50 nm to 50μm. In some embodiments, the depth is equal to or greater than 50 nm. Insome embodiments, the depth is equal to or greater than 100 nm. In someembodiments, the depth is equal to or greater than 150 nm. In someembodiments, the depth is equal to or greater than 200 nm. In someembodiments, the depth is equal to or greater than 400 nm. In someembodiments, the depth is equal to or greater than 600 nm. In someembodiments, the depth is equal to or greater than 800 nm. In someembodiments, the depth is equal to or greater than 1.0 μm. In someembodiments, the depth is equal to or greater than 10 μm. In someembodiments, the depth is equal to or greater than 20 μm. In someembodiments, the depth is equal to or greater than 30 μm. In someembodiments, the depth is equal to or greater than 40 μm.

In some embodiments, the depth is equal to or less than 50 μm. In someembodiments, the depth is equal to or less than 40 μm. In someembodiments, the depth is equal to or less than 30 μm. In someembodiments, the depth is equal to or less than 20 μm. In someembodiments, the depth is equal to or less than 10 μm. In someembodiments, the depth is equal to or less than 1 μm. In someembodiments, the depth is equal to or less than 800 nm. In someembodiments, the depth is equal to or less than 600 nm. In someembodiments, the depth is equal to or less than 400 nm. In someembodiments, the depth is equal to or less than 200 nm. In someembodiments, the depth is equal to or less than 150 nm. In someembodiments, the depth is equal to or less than 100 nm.

In some embodiments, the width of the pillars may range from 50 nm to 1μm.

FIG. 2B shows a schematic of the 2D holographic metasurface includingmetal vias in accordance with embodiments of the disclosure. As shown,the dielectric pillars have an extension parallel to the wafer. Theextension of each sub-pillar 202 is connected to a metal via 220.

Processes

The disclosure provides a process suitable for large-scale commercialfabrication. The dielectric pillars, such as amorphous silicon (a-Si) orpoly-crystalline silicon, may be deposited by using plasma-enhancedchemical vapor deposition (PECVD) or CVD.

The nano-scale gaps between the dielectric pillars may be formed byetching using either electron beam lithography, for smaller productionvolumes (e.g. prototyping), or with deep UV immersion lithography, forlarge production volumes.

The complementary metal-oxide-semiconductor (CMOS) transistors can befabricated on a wafer, such as a crystalline silicon wafer. Then, theCMOS transistors can be connected through metal vias to the dielectricpillars for applying a voltage to each pair of pillars, which acts as acapacitor. The metal vias can be planarized with deposition of an oxidelayer (e.g. SiO₂ deposition), followed by chemical mechanical polishing(CMP) to achieve sub-nanometer surface flatness over the wafer. The CMOStransistors may be metal-oxide-semiconductor field-effect transistors(MOSFETs). The fabrication processes are compatible with CMOS processes.

FIG. 3 is a flow chart illustrating the steps of forming the 1Dholographic metasurface in accordance with embodiments of thedisclosure. A method 300 for fabricating a holographic metasurfacedevice may include depositing a conductive layer over a holographicregion of a wafer at operation 302. The method 300 may also includedepositing a dielectric layer (e.g. a-Si) over the conducting layer atoperation 304.

The method 300 may further include patterning a hard mask (e.g. Al₂O₃)on the dielectric layer (e.g. a-Si) at operation 306.

In some embodiments, the patterning may be performed by e-beamlithography when volume is small. The e-beam lithography includesscanning a focused beam of electrons on a surface covered with anelectron-sensitive film, e.g. a resist. The electron beam can change thesolubility of the resist, enabling selective removal of either exposedor non-exposed regions of the resist by immersing the resist in asolvent, e.g. developer. The e-beam lithography can create very smallstructures or patterns in the resist that can be subsequentlytransferred to a substrate material by etching. The e-beam lithographycan create patterns with a sub-10 nm resolution.

In some embodiments, the patterning may also be performed by deep-UVimmersion lithography for large volume production. In some embodiments,the gap size may be about 100 nm, and is within the limits of deep UVimmersion lithography. The deep UV immersion lithography uses UV lightto transfer a geometric pattern from a photomask to a light-sensitivechemical photoresist on a substrate. The pattern in the etching resistis created by exposing to UV light, either directly, without using amask, or with an optical mask. The photoresist is exposed to a patternof intense UV light. The exposure to UV light can cause a chemicalchange that allows the photoresist to be removed by a solution or adeveloper. The photoresist may become soluble in the developer whenexposed or unexposed regions may be soluble in the developer.

In the deep UV immersion lithography, UV light travels down through asystem of lenses and then through a liquid medium (e.g. water) beforereaching the photoresist on the wafer. The deep UV immersion lithographyreplaces an air gap between the lenses and the wafer surface with theliquid medium that may have a refractive index greater than one. Theresolution can be increased by a factor equal to the refractive index ofthe liquid. The deep UV immersion lithography uses light from laserswith wavelengths of 248 nm and 193 nm, which allow small feature sizesdown to 50 nm.

The method 300 may also include etching the dielectric layer to form aplurality of dielectric pillars (e.g. a-Si pillars) with a plurality ofnano-scale gaps between the pillars at operation 308.

The refractive index tunable core material can be integrated or filledinto the nano-scale gaps between the dielectric pillars. For example,the tunable core material may include liquid crystals and EO polymers,which can be deposited directly via spin coating, such that the liquidcrystals fill the nano-scale gaps between the dielectric pillars viacapillary action. The method 300 may further include filling theplurality of nano-scale gaps with a refractive index tunable corematerial at operation 310.

In some embodiments, the refractive index tunable core material mayinclude a liquid crystal or EO polymers. The filling of the liquidcrystal may include preparing the surface to be hydrophobic orhydrophilic, followed by spin coating the liquid crystal over theplurality of pillars, and continued with filling the liquid crystal intothe nano-scale gap by a capillary action and encapsulating the liquidcrystal with a clear coating.

In some embodiments, the filling of the liquid crystal may includeapplying a coating to a first portion of the plurality of nano-scalegaps, followed by spin coating the liquid crystal onto the plurality ofdielectric pillars, then filling the liquid crystal into a secondportion of the plurality of nano-scale gaps by a capillary action, andcontinues with encapsulating the liquid crystal with a clear coating.

FIG. 4A shows the 1D metasurface before the integration of liquidcrystals with the dielectric pillars in accordance with embodiments ofthe disclosure. FIG. 4B shows the 1D metasurface before the integrationof liquid crystals in accordance with embodiments of the disclosure.Liquid crystal infiltration may occur by capillary action. Each pair ofpillars is individually voltage biased to create arbitrary holograms.

In some embodiments, the nano-scale gap 404 may have substantially thesame width as the gap 402. In some embodiments, the gap 404 may belarger than the gap 402, as shown in FIG. 4A. In some embodiments, allthe nano-scale gaps between the pillars for each holographic element 406are filled with a refractive index tunable core material, e.g. liquidcrystal, as shown in FIG. 4B, which may be simple and low cost.

In some embodiments, every other gap 404 between the pillars, i.e.between the adjacent pairs of pillars, may be covered with a surfacecoating. For example, a surface coating 408 may be applied to cover somenano-scale gaps, such as the larger gaps 404 between the holographicelements. With the coating, only the small gaps 402 between the pillarsin each holographic element are filled with the refractive index tunablecore material, such as liquid crystals. The surface of the dielectricpillars may be prepared to be either hydrophobic or hydrophilic toencourage the filling of the tunable core material or preventing thefilling of the tunable core material in some nano-scale gaps, dependingon the type of tunable core material.

In the case of chalcogenide glass such as GST, sputtering can beemployed, followed by a wet or dry etch to remove the GST from all areasexcept inside the pillar cores.

EXAMPLES

FIG. 5 shows a cross-sectional view of deposition of a conductive layerfor wirebond on a first portion of a wafer in accordance withembodiments of the disclosure. As shown in FIG. 5, a first conductivelayer 508 is deposited over a dielectric layer 504 (e.g. SiO₂), which isdeposited over a wafer 502 (e.g. crystalline silicon wafer). Thedeposition of SiO₂ may use CVD, thermal oxidation or PECVD, amongothers. The first conductive layer for wirebond may include copper (Cu),aluminum (Al), or other CMOS compatible metals, among others.

A first Ti adhesion layer 506 is deposited between the first conductivelayer 508 and the SiO₂ layer 504 underneath. A second Ti adhesion layer510 is deposited between the first conductive layer 508 and a TiO₂ layer512 above. The deposition of the first conductive layer and the Tiadhesion layer may use sputtering, or physical vapor deposition (PVD),among others. The deposition of TiO₂ may use CVD, or PECVD, amongothers. The TiO₂ layer 512 acts as an adhesion layer to the oxide layer(e.g. SiO₂) above (not shown).

FIG. 6 shows a cross-sectional view of deposition of a conductive layeras a metallic reflector on a second portion of the wafer in accordancewith embodiments of the disclosure. A second conductive layer 602 isdeposited over a second portion of the wafer 502. The second conductivelayer 602 acts as the metal reflector for the holographic element.

An oxide layer 606 may be deposited over the second conductive layer602, for example, using CVD, or PECVD, among others. The oxide layer 606may include Al₂O₃, which acts as an etch stop layer. Again, a Tiadhesion layer 604 is deposited between the second conductive layer 602and the SiO₂ layer 504. The SiO₂ layer 504 is deposited over the wafer502. The second conductive layer 602 may include Cu, Al, or other CMOScompatible metals, among others. The deposition of the metal reflectorand the Ti adhesion layer may use sputtering, or physical vapordeposition (PVD), among others.

FIG. 7 shows a cross-sectional view of plasma enhanced chemical vapordeposition (PECVD) of dielectric layer (e.g. SiO₂) over the conductivelayers and etching the dielectric layer in accordance with embodimentsof the disclosure. As shown, an oxide layer 702, such as SiO₂, can bedeposited over the first conductive layer 508 and a portion of thesecond conductive layer 602 by PECVD or CVD.

FIG. 8 shows a cross-sectional view of PECVD and etching of thedielectric layer (e.g. SiO₂) after the step of FIG. 7 in accordance withembodiments of the disclosure. As shown, a thin SiO₂ 802 is depositedover the Al₂O₃ layer 606 Also, the SiO₂ layers 702 and 802 as well asTiO₂ layer 512 are etched to expose the Ti layer 510 for the wirebondregion.

FIG. 9 shows a cross-sectional view of PECVD of amorphous silicon afterthe step of FIG. 8 in accordance with embodiments of the disclosure. Asshown, a-Si layer 902 is deposited over the entire region including,both, the holographic region and the interconnect region. The Ti layer510 allows bidirectional change flow of the a-Si layer 902. Mostinterfaces between metal and semiconductor form a ‘schottky barrier’,with diode behavior (i.e. one-way flow). The interface between Ti anda-Si, however, forms an ‘ohmic contact’ which readily conducts charge ineither direction. The thin SiO₂ layer 802 acts as an adhesion layerbetween the Al₂O₃ layer 606 and the dielectric layer (e.g. a-Si) 902.

FIG. 10 shows a cross-sectional view of deposition of a hard mask (e.g.Al₂O₃) after the step of FIG. 9 in accordance with embodiments of thedisclosure. As shown in FIG. 10, a hard mask 1002, such as Al₂O₃ isdeposited over the a-Si layer 902. The hard mask 1002 is partiallyetched away to expose the a-Si layer in the wirebond region by lowresolution process. Up to this stage, all these processes in FIGS. 1-10are low resolution processes.

FIG. 11 shows a cross-sectional view of e-beam lithography of resist(e.g. PMMA) after the step of FIG. 10 in accordance with embodiments ofthe disclosure. The cross-sectional view includes a side view of aninterconnect region including the first conductive layer (e.g. wirebond) on the left side, which may only need a low resolution process.The cross-sectional view also includes a front view of a holographicregion 1106 including the second conductive layer (e.g. metallicreflector) on the right side, which may need a high resolution process.As shown in FIG. 11, a poly (methyl methacrylate) (PMMA) resist 1102 maybe patterned to have a nano-scale gap 1104 in the holographic region1106 by e-beam lithography or deep UV immersion lithography, each ofwhich is a high resolution process.

FIG. 12 shows a cross-sectional view of etching of the hard mask (e.g.Al₂O₃) with a patterned resist (e.g. PMMA) to form a nano-scale gap inthe hard mask after the step of FIG. 11 in accordance with embodimentsof the disclosure. The hard mask 1002, such as Al₂O₃, may form anano-scale gap 1202 by plasma etching through using the patterned PMMAresist 1102. The nano-scale gap 1202 in the dielectric layer hassubstantially the same width as the nano-scale gap 1104 in the PMMAresist 1102. The plasma etching may include a mixture of Cl₂ and Arplasma. Again, the etching of the hard mask is performed by e-beamlithography or deep UV immersion lithography, each of which is a highresolution process.

FIG. 13 shows a cross-sectional view of stripping the resist (e.g. PMMA)after the step of FIG. 12 in accordance with embodiments of thedisclosure. As shown, the PMMA resist 1102 may be stripped by using achemical process. The PMMA resist may be removed by being exposed to anelectron beam in e-beam lithography or exposed to UV light in deep UVimmersion lithography. The PMMA resist can then be dissolved by using adeveloper. For example, the PMMA resist 1102 may be soaked in a solvent,such as acetone, until the PMMA resist is completely removed orstripped. Again, this step is a high resolution process.

FIG. 14 shows a cross-sectional view of etching the a-Si layer with thepatterned hard mask to form a nano-scale gap of a high aspect ratiobetween the a-Si pillars in the a-Si layer and to expose the titaniumlayer after the step of FIG. 13 in accordance with embodiments of thedisclosure. As shown, a-Si is etched to form a nano-scale gap 1402 bye-beam lithography or deep UV immersion lithography. Also, the a-Silayer 902 and the TiO₂ layer 512 are etched such that the Ti layer 510is exposed in the interconnect region. Again, this step is a highresolution process.

In some embodiments, the nano-scale gap 1402 may be 100 nm wide and 840nm deep, and the a-Si pillars may be 170 nm wide, which corresponds to alaser wavelength of 1550 nm. In some embodiments, the nano-scale gap1402 has a width of 60 nm, a depth of 480 nm, the pillars may be 100 nmwide, which corresponds to a laser wavelength of 905 nm.

FIG. 15 shows a cross-sectional view of wet etching the titanium layerto expose the conductive layer after the step of FIG. 14 in accordancewith embodiments of the disclosure. As shown, the Ti adhesion layer 506is etched away in the interconnect region. This is a low resolutionprocess.

FIG. 16 shows a cross-sectional view of wire bonding to the conductivelayer after the step of FIG. 15 in accordance with embodiments of thedisclosure. As shown, a wire bus 1602 is wire bonded to the firstconductive layer 508. This is also a low resolution process.

FIG. 17 shows a cross-sectional view of applying liquid crystal to fillthe gap in the a-Si layer after the step of FIG. 16 in accordance withembodiments of the disclosure. As shown, liquid crystal 1702 is appliedto cover the entire interconnect region and the holographic regionincluding the nano-scale gap 1402.

Pseudo-Bosch Process at Cryogenic Temperatures

The disclosure provides methods of performing the pseudo-Bosch processat cryogenic temperatures. FIG. 18 illustrates processing issuesincluding undercut near amorphous silicon pillar in accordance withembodiments of the disclosure. The etching of the a-Si pillars may becharacterized by geometric parameters defined in FIG. 18. An undercut1802 is the distance between the edge of the hard mask and the actualfeature wall.

Practically, a required undercut is given by the following equation:

Allowable undercut=(Target etch width−minimum resolution)/2

For example, if the target is a 100 nm trench and the e-beam can create50 nm features, then the maximum allowable undercut is 25 nm. Theundercut should be not more than 40 nm.

In some embodiments, the undercut is less than 40 nm. In someembodiments, the undercut is less than 30 nm. In some embodiments, theundercut is less than 20 nm. In some embodiments, the undercut is lessthan 15 nm. In some embodiments, the undercut is less than 10 nm. Insome embodiments, the undercut is less than 5 nm.

A sidewall angle 1804 is the angle between the etch stop layer 1812 overthe substrate and the wall 1810 of the dielectric pillar. Theoretically,the sidewall angel is 90°. Practically, as depicted, the sidewall angle1804 may be above 80°, for example, 93°.

In some embodiments, the sidewall angle is equal to or less than 100°.In some embodiments, the sidewall angle is equal to or less than 98°. Insome embodiments, the sidewall angle is equal to or less than 96°. Insome embodiments, the sidewall angle is equal to or less than 94°. Insome embodiments, the sidewall angle is equal to or less than 92°. Insome embodiments, the sidewall angle is equal to or less than 90°. Insome embodiments, the sidewall angle is equal to or less than 88°. Insome embodiments, the sidewall angle is equal to or less than 86°. Insome embodiments, the sidewall angle is equal to or less than 84°. Insome embodiments, the sidewall angle is equal to or less than 82°. Insome embodiments, the sidewall angle is greater than 80°. In someembodiments, the sidewall angle is greater than 82°. In someembodiments, the sidewall angle is greater than 84°. In someembodiments, the sidewall angle is greater than 86°. In someembodiments, the sidewall angle is greater than 88°. In someembodiments, the sidewall angle is greater than 90°. In someembodiments, the sidewall angle is equal to or less than 92°. In someembodiments, the sidewall angle is equal to or less than 94°. In someembodiments, the sidewall angle is equal to or less than 96°. In someembodiments, the sidewall angle is equal to or less than 98°.

In some embodiments, both the notching 1806 and footing 1808 have acharacteristic size of less than 50 nm. In some embodiments, both thenotching and footing have a characteristic size of less than 40 nm. Insome embodiments, both the notching and footing have a characteristicsize of less than 30 nm. In some embodiments, both the notching andfooting have a characteristic size of less than 20 nm. In someembodiments, both the notching and footing have a characteristic size ofless than 10 nm. In some embodiments, the notching and footing may besmaller than half of the width of the element, which may cause a minordegradation in optical performance.

In some embodiments, the etch depth of the nano-scale gap between thedielectric pillars is deep, for example, 840 nm. The hard mask materialmay be selected as Al₂O₃, such that the hard mask may have an etch rateof at least 30 times slower than that of a-Si, which can reduce theundercut.

In some embodiments, the disclosed method may avoid to producenanospikes, which are commonly called ‘Si Black’ or ‘Grass’.

In some embodiments, the etching may be performed by using a plasmaetcher, such as an Oxford PlasmaLab 100 Inductively Coupled PlasmaEtcher among others. A Pseudo-Bosch process may be used to perform theetching with a mixture of SF₆ and C₄F₈ gases. The SF₆ etching has bothisotropic and anisotropic components and can etch anisotropicallydownwards. However, the C₄F₈ gas isotropically deposits an isotropicprotective layer or protective coating and can be used to reduce theetch rate in all directions.

As an example, SF₆ alone may etch laterally at a first rate, e.g. 100nm/min, and etch downwards at a second rate, e.g. 200 nm/min. The C₄F₈may deposit a protective layer that reduces the etch rate by 100 nm/minin all directions. Hence, the net etch rate is zero laterally, and 100nm/min downwards.

The pseudo-Bosch process includes various etching parameters, such asgas concentration, chamber pressure and plasma power, temperature, tocontrol undercut and sidewall angles, among others. When an etchingparameter, such as C₄F₈ concentration, decreases, the undercut mayincrease and the sidewall angle may be reduced such that the trench maybecome wider with depth.

The undercut may also vary with the material. For example, when the sameetching parameters for mono-crystalline or poly-crystalline silicon areused for amorphous silicon, the undercut is significantly large, such as200 nm or more for amorphous silicon. The large undercut in a-Si maylimit its use to a micron scale application.

Applicants surprisingly discover that cryogenically cooling amorphous Sito a temperature below room temperature can etch the amorphous siliconwith a reduced undercut, for example, less than 10 nm. It is believedthat a lower temperature may increase the rate of protective C₄F₈deposition and may also decrease the random thermal energy in theamorphous Si. As such, more energy may be required to break the bondsbetween a-Si atoms at reduced temperature, which may bring the behaviorcloser to that of crystalline or poly-crystalline silicon.

In some embodiments, the a-Si may be etched at temperatures below roomtemperature to obtain an undercut of less than 50 nm, preferably 10 nm.In some embodiments, the a-Si may be cooled to 10° C. or below. In someembodiments, the a-Si may be cooled to 5° C. or below. In someembodiments, the a-Si may be cooled to 0° C. or below. In someembodiments, the a-Si may be cooled to −5° C. or below. In someembodiments, the a-Si may be cooled to −10° C. or below. In someembodiments, the a-Si may be cooled to −15° C. or below. In someembodiments, the a-Si may be cooled to −20° C. or below. In someembodiments, the a-Si may be cooled to −30° C. or below. In someembodiments, the a-Si may be cooled to −40° C. or below. In someembodiments, the a-Si may be cooled to −50° C. or below. In someembodiments, the a-Si may be cooled to −60° C. or below. In someembodiments, the a-Si may be cooled to −70° C. or below. In someembodiments, the a-Si may be cooled to −80° C. or below. In someembodiments, the a-Si may be cooled to −90° C. or below. In someembodiments, the a-Si may be cooled to −100° C. or below. In someembodiments, the a-Si may be cooled to −110° C. or below.

In some embodiments, the etching parameters may be adjusted at roomtemperature to obtain an undercut of less than 50 nm, preferably 10 nm.

Any ranges cited herein are inclusive. The terms “substantially” and“about” used throughout this Specification are used to describe andaccount for small fluctuations. For example, they can refer to less thanor equal to. ±5%, such as less than or equal to ±2%, such as less thanor equal to ±1%, such as less than or equal to ±0.5%, such as less thanor equal to ±0.2%, such as less than or equal to ±0.1%, such as lessthan or equal to ±0.05%.

Having described several embodiments, it will be recognized by thoseskilled in the art that various modifications, alternativeconstructions, and equivalents may be used without departing from thespirit of the invention. Additionally, a number of well-known processesand elements have not been described in order to avoid unnecessarilyobscuring the present invention. Accordingly, the above descriptionshould not be taken as limiting the scope of the invention.

Those skilled in the art will appreciate that the presently disclosedembodiments teach by way of example and not by limitation. Therefore,the matter contained in the above description or shown in theaccompanying drawings should be interpreted as illustrative and not in alimiting sense. The following claims are intended to cover all genericand specific features described herein, as well as all statements of thescope of the present method and system, which, as a matter of language,might be said to fall in between.

1. (canceled)
 2. An optical metasurface comprising: a wafer; aconductive layer over a holographic region of the wafer; and a pluralityof metasurface holographic elements comprising: a plurality ofdielectric pillars with a plurality of nano-scale gaps over theconductive layer, and a refractive index tunable core material in theplurality of nano-scale gaps.
 3. The optical metasurface of claim 2,wherein each metasurface holographic element comprises a pair of theplurality of dielectric pillars with one of the plurality of nano-scalegaps between the pair of plurality of dielectric pillars.
 4. The opticalmetasurface of claim 2, wherein the refractive index tunable corematerial comprises one of a liquid crystal, EO polymers, or chalcogenideglass.
 5. The optical metasurface of claim 4, further comprising a clearcoating encapsulated over the liquid crystal.
 6. The optical metasurfaceof claim 2, wherein the plurality of dielectric pillars comprises aconstant gap between each of the pillars.
 7. The optical metasurface ofclaim 2, wherein the plurality of dielectric pillars comprises aplurality of pairs of dielectric pillars.
 8. The optical metasurface ofclaim 2, wherein the nano-scale gap between each pair of pillars issmaller than the nano-scale gap between two adjacent pairs of pillars.9. The optical metasurface of claim 2, wherein the plurality ofdielectric pillars comprises amorphous silicon.
 10. The opticalmetasurface of claim 2, wherein the aspect ratio of height to width ofthe nano-scale gap is at least
 5. 11. The optical metasurface of claim2, further comprising a plurality of conductive contacts over aninterconnect region of the wafer for wire bonding to a CMOS, theplurality of conductive contacts configured to apply voltage to theplurality of dielectric pillars.
 12. The optical metasurface of claim 2,wherein the nano-scale gap has a sidewall angle between 80° and 100°.13. The optical metasurface of claim 2, wherein the nano-scale gap hasan undercut less than 50 nm.
 14. The optical metasurface of claim 2,wherein the nano-scale gap ranges from 75 nm to 200 nm.
 15. The opticalmetasurface of claim 2, wherein the plurality of dielectric pillars havea depth from 50 nm to 50 μm.
 16. The optical metasurface of claim 2,wherein the plurality of metasurface holographic elements have a pitchfrom 200 nm to 1.6 μm.
 17. The optical metasurface of claim 2, whereineach of the plurality of metasurface holographic elements comprises asub-wavelength metasurface holographic element.
 18. The opticalmetasurface of claim 2, further comprising an oxide layer between theplurality of dielectric pillars and the conductive layer.
 19. Theoptical metasurface of claim 18, wherein the oxide layer comprisesAl₂O₃.
 20. An optical metasurface comprising: a wafer comprising acrystalline silicon; a conductive layer over a holographic region of thewafer; and a plurality of metasurface holographic elements comprising: aplurality of dielectric pillars with a plurality of nano-scale gaps overthe conductive layer, and a refractive index tunable core material inthe plurality of nano-scale gaps, wherein each of the plurality ofmetasurface holographic elements comprises a sub-wavelength metasurfaceholographic element.
 21. An optical metasurface comprising: a wafercomprising a crystalline silicon; a conductive layer over a holographicregion of the wafer; and a plurality of metasurface holographic elementscomprising: a plurality of dielectric pillars with a plurality ofnano-scale gaps over the conductive layer, and a refractive indextunable core material in the plurality of nano-scale gaps, wherein eachof the plurality of metasurface holographic elements comprises asub-wavelength metasurface holographic element, wherein the plurality ofdielectric pillars comprises amorphous silicon.